We have these parts for the Novellus Tools
OEM PN Part Description Part Image Signet PN
Minor Target Change Kit3027F
Minor Target Change Kit3056C
Minor Target Change Kit3056B
3180 Target Change Kit3051C
Screw Kit for Varian 32903042
Sequel Heater Strap Kit8501A
3180/90 Minor Target Change Kit3027G
3180/3190 Hardware Kit3004
3180/3190 Vented Screw Kit3003
3180/3190 Vented Screw Kit3002
Sequel RF Strap Kit8500
3180/90 Major Target Change Kit3028F
Sequel Heater Strap Kit8501
3180/3190 Target Replacement Kit3001C
4072-2 Fil. Replacement Kit, 6200 Bernas4072-2
Fil. Replacement Kit, 6200 Bernas4072-1
Fil. Replacement Kit, 6200 Bernas4072
Filament Change Kit - NV Series4065
3180/3190 Target Replacement Kit3001A
3180/3190 Target Replacement Kit3001B
00-664205-00Shield, Primary 4"33-664205
00-664219-00Shield, Pressure plate cavity, 4"33-664219
00-664337-00Shield Press PLT Cavity33-4337
00-672406-00Shutter, 150mm, 328033-2406
00-673816-00Shield, ConMag Combo 33-3816
00-674780-00Shield Press PLT33-4780
00-674841-00Shield Table33-4841
00-674846-00Secondary Shield33-4846
00-674847-00Primary Shield33-4847
00-677852-01Ring Etch33-677852-01
00-678211-00Press Plate Cavity Alum33-8211
00-678212-00Press Plate Cavity Alum33-8212
00-678214-00Shield Press Plate Cavity Alum33-8214
00-678215-00Shield Press Plate Cavity Alum33-8215
00-678216-00Shield Press Plate Cavity Alum33-8216
00-678506-01Shield Outer33-8506-01
00-678507-01Shield Inner33-8507-01
00-680239-01Shield Ground33-0239-01
00-680574-00Shield Press Plate Cavity33-0574
00-680926-00Shield Heater Primary33-0926
00-684266-00Shield Insulator33-4266
00-684267-00Ring Etch33-684267
00-684289-00Ring Etch33-4289
00-684290-00Shield Insulator33-4290
00-685949-00Shield Secondary Table33-5949
00-685950-00Shield Primary Table33-5950
04-712094-00Source Assy P/P L/L Ram33-712094
04-712159-00Source Assy L/L ram33-712159
04-712188-00Source Assy L/L ram Center33-712188
04-712264-01Front Plate Heater Bore Shield33-2264-01
04-714075-01Insert, Clip Ring33-4075
04-715835-02Shield Front Plate Heater Bore33-5839-02
04-715839-01Shield Front Plate Heater Bore33-5839-01
04-715865-02Shield, Cavity, 6"33-5865
04-715893-01Shield, Cavity PP 4"33-9301
04-715894-00Press Plate Cavity 5"33-715894
04-718928-02Shield Press Plate Cavity 6"33-8928-02
04-719860-01Shield Press Plate Cavity33-9860-01
04-719860-02Shield Press Plate Cavity33-9860-02
30013180/3190 Target Replacement Kit3001
N/AMinor Target Change Kit, 31803046
N/A3290 Target Change Kit3045

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.
 
 
 
Copyrights Signet Products Corp. 2000 - 2017
  
 
Signet Products, Corp.
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
phone: (650) 592-3575
e-mail rdavies@signetproducts.com