Signet provides top quality replacement parts for Varian/Novellus and MRC sputtering systems as well as Electron Beam Guns from Temescal, CHA, and Telemark.

Click here to view a List of Parts for 3180/3190 & 3280/3290

Click here Product Data Sheet on Wafer Clips for the 3180, 3190 & 3290
Custom Kits can be Created to Meet Your Specific Needs

The following are examples of high volume Signet Products kits offered for PVD Systems.

Varian/Novellus

Part List for 3180/3190
Signet Part #
Part Description
3001 3180/3190 Target Replacement Kit
3021 3-Target Overhall kit - Motorola
3022 3290 Hardware Kit
3027E Minor Target Change kit
3028D Minor Target Change kit
3003 3180/3190 Vented Screw Kit
3004 3180/3190 Hardware Kit
3042 3180/3190 Screw Kit for Varian 3290
3045 3290 Target Change Kit


Example - Kit Part # 3001 - 3180/3190 Target Replacement Kit Parts List
Signet Part #
OEM Part # Description Qty
01-1037 12-600024-00 SHCV 10-32 X 3/8 9
33-0050 N/A Tool, .050 hex drive1
33-3941 00-673941-00 Set Scr, 4-40 X 1/4 Pkg 20 1
33-3046 00-684046-00 Turner Washer 9
33-4198 00-664198-00Anode Cover 3
For Additional Information, Please See Our More Info Form


MRC

Signet Part #
Part Description
5003 902 O-Ring Kit Kit
5004 903 O-Ring Kit, Revision A
5005 603 O-Ring Kit
5023 8667 RF Mag Kit
5024 Aires Etcher Kit
For Additional Information, Please See Our More Info Form
Example - Part # 8000 - 4-Pocket EB Gun Emitter Rebuild Kit Parts List
Signet
Part #
Temescal Ref # CHA/Telemark Ref # Description Qty
80-6871E 317-6871 273-0001 Filament 7 1/2 Turns 1
80-8781E 602-8781 273-0010HV Spacing Insulator 2
80-3131 303-3131 273-0006Insulator, Flanged 4
80-6721 303-6721 273-0005Locating Insulator 1
00-6037 1321-1254 271-6050 6-32 X 3/8 SHCV (thread vented) 4
03-6025 1321-1252 271-6030SHC 6-32 X 1/4 9
03-6050 1321-1255 271-6060 SHC 6-32 X 1/2 2
03-6W00 1378-1200 273-0007Flat Washer #6 2
  
 An OEM part number followed by "Ref" indicates a Signet improved design part. 
  
 
Signet products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com
  
   
   
      
 
Copyright Signet Products Inc. 2004 - 2008
Last update July 24, 2008