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Parts List for all Axcelis / Eaton GSD Equipment Systems
 
A small picture following the Signet part number is a link to the Part Picture page. 
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. 
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows up arrow image before the Signet
Part Number or OEM Part Number to re-sort the list.
up arrow OEM PN Picture DWG u arrow Signet Part # Part Description KIT PDS
1703315044-3315Bushing, Socket Joint - SourcePDS
1703316044-3316Ball JointPDS
1703644044-3644Retaining Rod, Tantalum
1704387044-4387Filament Clamp
1706199144-1991Aperture Quad Exit w/ACPDS
1706687144-6871Plate Strike Injector Faraday w/ACPDS
170868044-0868Insulating Bushing, A/C
1708971144-8971Electrode .5 VGPDS
1709724044-7240Insulator
1709732044-9732Spacer
1709734044-9734Feed Strap, Filament
1709851144-9851Source Housing Exit Aperture /ACPDS
1709920144-9201Plate Strike, ResolverPDS
1709963144-9631Inner Beam Dump w/ACPDS
1709966144-9661Outer Beam Dump /ACPDS
1709967144-9671Outer End w/ACPDS
1709983144-9831Shield Faraday Cup w/ACPDS
1710046144-0461Cup Shield w/ACPDS
1710052144-0521Exit Dump w/ACPDS
1710123044-0123Filament Shield
1711178044-1780Outer Dump w/ACPDS
1711180044-1180Outer Duct w/ACPDS
1711181044-1181Inner Duct w/ACPDS
1711186044-1186Flange Tube w/ACPDS
1711319044-1319Aperture 70 degree Magnet w/ACPDS
1711541044-1541Aperture Faraday Support, Linac w/ACPDS
1711593044-5930Plate Aperture, Linac VGPDS
1712174044-1740Repeller
1712175044-2175Inner Cup Shield
17121760A44-1760Set Screw, Moly
1712177044-2177Repeller Screw, Moly
1712185044-2185Repeller Insulator
1712190044-2190Cathode Support Insulator
1712193044-2193Cathode Nut - Moly, ELS
1712341044-3410Insulator Short
1712342044-3420Insulator, LongPDS
17123430 Ref.40-3430Retainer, Alumina
1712441044-2441Spacer Retaining Rod
1712556144-5561Extraction Electrode, ManipulatorPDS
1712557144-5571Ground Electrode, ManipulatorPDS
1712759044-2759Arc Chamber, Moly
1712760044-2760Repeller, Moly
1712761044-2761Shield, Insulator
1712765044-2765Filament Shield
1712811044-2811Arc Slit, 15R Moly
1712823044-8230Spacer, Shoulder Screw
1712930 Ref.40-2193Cathode Shield, Graphite
1712970044-2970Strike Plate #1PDS
1712971044-2971Strike Plate #2PDS
1712972044-2972Strike Plate #3PDS
1712973044-2973Strike Plate #4PDS
1713161044-3161Defining Beam AperturePDS
1713229044-3229Ground Electrode InsertPDS
1713327044-3270Cathode Insulator, ELS/VAE
1713330044-3330Filament Feed Strap
1713331044-3331Arc Chamber W ELS/VAE
1713334044-3334Cathode Repeller
1713340044-3340Arc Chamber Moly ELS/VAE
17133400 Ref.40-3340A/C for a Box linerPDS
1713544044-3544Electron Shower Liner /AC
17142890B44-2890Slotted Cathode
17156990 Ref.40-5699Cathode Wire AssemblyPDS
1715800044-5800Cathode,Two piece Moly/Tungsten
1716164044-1640Beam Line Bellows, GSD
1717002044-7002Extraction Electrode /ACPDS
1717003044-0030Ground Electrode /ACPDS
1717004044-7004Extraction Electrode InsertPDS
1717006044-7006Electrode SpacerPDS
1717007044-7007Electrode Shield
1717060044-0600Repeller, W
1717061044-0610Repeller Stud, W
17174410 Ref.40-7441Insulator, GSD ELS - AluminaPDS
1718912044-8912Filament ELS with Flats
1718915044-8915Cathode Plate, SourcePDS
1723010044-3010Arc Slit, T15 Mo
1725485044-5485Filament, ELS
1728785044-7850Filament, ELS .040
1728786044-8786Graphite Cathode Support
1728787044-8787Cathode Insulator Block
1728788044-8788Filament Clamp, ELSPDS
17287880 Ref.40-8788Enhanced ELS Fil. Clamp w/Ta screwPDS
176653144-6531Plate Burn - ThruPDS
1789800 Ref.40-8980-1Filament Clamp, EnhancedPDS
178985044-8985Filament
400116644-1166Spring, Compression
400116744-1167Spring, Compression
430003144-0031Retaining Rod Clip
5001608 & 7230-0003-001437-6002Standoff, 3/8D X 3/4L, 6-32
N/A4028Filament Replacement KitKIT
N/A40-3340-42Moly Box Liner, ELS Gas OnlyPDS
     
 
Copyrights Signet Products, Corp. 2017
 
 
 
Last update January 27, 2016
 
 
     
 
Signet Products, Corporation
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
Phone: (650) 592-3575
e-mail: rdavies@signetproducts.com