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Parts List for Aixtron 2600 Systems
A small picture following the Signet part number is a link to the Part Picture page. 
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. 
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows up arrow image before the Signet
Part Number or OEM Part Number to re-sort the list.
up arrow OEM PN Picture DWG u arrow Signet Part # Part Description KIT PDS
52-0120-1Mo Insert (for use with part # 52-0120)
53-0470Particle Trap Housing
53-01112600G3 Quartz Thrust Piece
53-01102600G3 Quartz Ceiling Plate
52-0150InP Wafer (100mm)
52-0140GaAs Wafer(100mm)
52-01202600G3 Exh Coll Ring w Opt Mon Enhanced
52-01022600G3 O-Ring
52-0100-1Mo Insert (for use with 52-0100)
52-01002600G3 Exhaust Collector Ring, EnhancedPDS
9007Ceran Upper Ring KitKIT
4007024653-01502600G3 Exhaust Collector Ring (All Moly)
4002023690062600G3 Ceran Lower Ring KitKIT
4002037853-08602600G3 Ceiling Plate (Quartz) w/SN
4002043653-08202600G3 Diffusion barrier (Quartz)
4002044553-08402600G3 Sleeve (Quartz)
4002045753-05702600G3 Segment (Quartz)
4002051253-07502600G3 Nozzle injector (Quartz)
4002058653-07602600G3 Supporting Tube (Quartz)
4002060053-06002600G3 Ceran Lower Ring Segment #1
4002060153-06012600G3 Ceran Lower Ring Segment #2 w/h
4002060253-06022600G3 Ceran Lower Ring Segment #3
4002060353-06032600G3 Ceran Lower Ring Segment #4 w/h
4002064253-07402600G3 Nozzle Holder (Quartz)
4002064353-07302600G3 Nozzle Holder (Quartz)
4002068653-08802600G3 Rot-monitoring (Quartz)
4002069053-07202600G3 Ceiling Plate (Quartz)
4002069153-07802600G3 Segment (Quartz)
4002069253-08102600G3 Sleeve (Quartz)
4002069353-07902600G3 Banana (Quartz)
4002069453-08502600G3 Ceiling Plate (Quartz)
4002071353-08302600G3 Ceiling Plate (Quartz)
4002076653-07702600G3 Base Plate Holder (Quartz)
4002079853-08702600G3 Ceiling Plate (Quartz) 11mm slot
4002080753-05902600G3 Nozzle Holder (Quartz)
4002090053-05102600G3 Nozzle (Quartz)
4002090853-07002600G3 Tension Disk (Quartz)
4002091153-05302600G3 Diffusion Barrier (Quartz)
4002091253-06902600G3 Supporting Segment (Quartz)
4002091353-06802600G3 Supporting Segment (Quartz)
4002091853-05202600G3 Ceiling Plate (Quartz)
4002091953-05502600G3 Supporting Tube (Quartz)
4002092053-05402600G3 Supporting Disk (Quartz)
4002096253-0670Segment (Quartz)
4002096353-06602600G3 Segment (Quartz)
4002096453-06502600G3 Segment (Quartz)
4002096553-06402600G3 Segment (Quartz)
4002103953-05602600G3 Pull Down Pad (Quartz)
4002105053-07102600G3 Ceiling Plate (Quartz)
4002105953-05802600G3 Sleeve (Quartz)
4002108153-06302600G3 Supporting Disk (Quartz)
4006003053-0300Glovebox Gauntlets - 300MM
4007014053-01032600G3 Exhaust Ring with Optical Monitor
4007020353-01902600G3 Exhaust Collector Ring
4102023653-0108Ceran Upper Ring Segment
Copyrights Signet Products, Corp. 2017
Last update January 27, 2016
Signet Products, Corporation
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
Phone: (650) 592-3575
e-mail: rdavies@signetproducts.com