Signet Products Part Search Page - Signet Products Inc.

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We have these parts for the Novellus Tools

OEM PN	Part Description	Part Image	Signet PN
	Minor Target Change Kit		3027F
	Minor Target Change Kit		3056C
	Minor Target Change Kit		3056B
	3180 Target Change Kit		3051C
	Screw Kit for Varian 3290		3042
	Sequel Heater Strap Kit		8501A
	3180/90 Minor Target Change Kit		3027G
	3180/3190 Hardware Kit		3004
	3180/3190 Vented Screw Kit		3003
	3180/3190 Vented Screw Kit		3002
	Sequel RF Strap Kit		8500
	3180/90 Major Target Change Kit		3028F
	Sequel Heater Strap Kit		8501
	3180/3190 Target Replacement Kit		3001C
	4072-2 Fil. Replacement Kit, 6200 Bernas		4072-2
	Fil. Replacement Kit, 6200 Bernas		4072-1
	Fil. Replacement Kit, 6200 Bernas		4072
	Filament Change Kit - NV Series		4065
	3180/3190 Target Replacement Kit		3001A
	3180/3190 Target Replacement Kit		3001B
00-664205-00	Shield, Primary 4"		33-664205
00-664219-00	Shield, Pressure plate cavity, 4"		33-664219
00-664337-00	Shield Press PLT Cavity		33-4337
00-672406-00	Shutter, 150mm, 3280		33-2406
00-673816-00	Shield, ConMag Combo		33-3816
00-674780-00	Shield Press PLT		33-4780
00-674841-00	Shield Table		33-4841
00-674846-00	Secondary Shield		33-4846
00-674847-00	Primary Shield		33-4847
00-677852-01	Ring Etch		33-677852-01
00-678211-00	Press Plate Cavity Alum		33-8211
00-678212-00	Press Plate Cavity Alum		33-8212
00-678214-00	Shield Press Plate Cavity Alum		33-8214
00-678215-00	Shield Press Plate Cavity Alum		33-8215
00-678216-00	Shield Press Plate Cavity Alum		33-8216
00-678506-01	Shield Outer		33-8506-01
00-678507-01	Shield Inner		33-8507-01
00-680239-01	Shield Ground		33-0239-01
00-680574-00	Shield Press Plate Cavity		33-0574
00-680926-00	Shield Heater Primary		33-0926
00-684266-00	Shield Insulator		33-4266
00-684267-00	Ring Etch		33-684267
00-684289-00	Ring Etch		33-4289
00-684290-00	Shield Insulator		33-4290
00-685949-00	Shield Secondary Table		33-5949
00-685950-00	Shield Primary Table		33-5950
04-712094-00	Source Assy P/P L/L Ram		33-712094
04-712159-00	Source Assy L/L ram		33-712159
04-712188-00	Source Assy L/L ram Center		33-712188
04-712264-01	Front Plate Heater Bore Shield		33-2264-01
04-714075-01	Insert, Clip Ring		33-4075
04-715835-02	Shield Front Plate Heater Bore		33-5839-02
04-715839-01	Shield Front Plate Heater Bore		33-5839-01
04-715865-02	Shield, Cavity, 6"		33-5865
04-715893-01	Shield, Cavity PP 4"		33-9301
04-715894-00	Press Plate Cavity 5"		33-715894
04-718928-02	Shield Press Plate Cavity 6"		33-8928-02
04-719860-01	Shield Press Plate Cavity		33-9860-01
04-719860-02	Shield Press Plate Cavity		33-9860-02
3001	3180/3190 Target Replacement Kit		3001
N/A	Minor Target Change Kit, 3180		3046
N/A	3290 Target Change Kit		3045

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

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	Signet Products, Inc. 2 Davis Drive Belmont, CA 94002 phone: (650) 592-3575 fax: (650) 592-7223 e-mail sales@signetproducts.com