We have these parts for the Novellus 3180 PVD Tool
OEM PN Part Description Part Image Signet PN
00-664205-00Shield, Primary 4"33-664205
00-664219-00Shield, Pressure plate cavity, 4"33-664219
00-664337-00Shield Press PLT Cavity33-4337
00-673816-00Shield, ConMag Combo 33-3816
00-674780-00Shield Press PLT33-4780
00-674841-00Shield Table33-4841
00-674846-00Secondary Shield33-4846
00-674847-00Primary Shield33-4847
00-677852-01Ring Etch33-677852-01
00-678211-00Press Plate Cavity Alum33-8211
00-678212-00Press Plate Cavity Alum33-8212
00-684266-00Shield Insulator33-4266
00-684267-00Ring Etch33-684267
00-684289-00Ring Etch33-4289
00-684290-00Shield Insulator33-4290
00-685949-00Shield Secondary Table33-5949
00-685950-00Shield Primary Table33-5950
04-712264-01Front Plate Heater Bore Shield33-2264-01
04-715835-02Shield Front Plate Heater Bore33-5839-02

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

 
 
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com