We have these parts for the Novellus 3190 PVD Tool
OEM PN Part Description Part Image Signet PN
00-677852-01Ring Etch33-677852-01
00-678211-00Press Plate Cavity Alum33-8211
00-678212-00Press Plate Cavity Alum33-8212
00-685949-00Shield Secondary Table33-5949
00-685950-00Shield Primary Table33-5950
04-712264-01Front Plate Heater Bore Shield33-2264-01
04-715835-02Shield Front Plate Heater Bore33-5839-02

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

 
 
 
Copyrights Signet Products Inc. 2000 - 2014
 
 
Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com