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We have these parts for the Novellus 3280 PVD Tool

OEM PN	Part Description	Part Image	Signet PN
00-678214-00	Shield Press Plate Cavity Alum		33-8214
00-678215-00	Shield Press Plate Cavity Alum		33-8215
00-678216-00	Shield Press Plate Cavity Alum		33-8216
00-680574-00	Shield Press Plate Cavity		33-0574
00-680926-00	Shield Heater Primary		33-0926
04-714075-01	Insert, Clip Ring		33-4075
04-715894-00	Press Plate Cavity 5"		33-715894
04-719860-01	Shield Press Plate Cavity		33-9860-01
04-719860-02	Shield Press Plate Cavity		33-9860-02

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

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	Signet Products, Inc. 2 Davis Drive Belmont, CA 94002 phone: (650) 592-3575 fax: (650) 592-7223 e-mail sales@signetproducts.com