Parts List for Axcelis - Eaton 3204, 3200 and 6200 Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
5053-0001-010103-1N0010-32 Hex Nut
5053-0001-004203-4N004-40 Hex Nut
N/A1088B6200 Bernas Conversion Kit
N/A1088C6200 Bernas Conversion Kit
30-7280CAlumina Bushing, .050" Hub
7435-0002-000137-0531TC Vacuum Gauge Tube
7230-0003-000437-6000Standoff, 3/8D X 1/2L, 6-32 5/32Dp.
7230-0003-001437-6002Standoff, 3/8D X 3/4L, 6-32
7230-0003-002037-6045Standoff, 1/2D X 3/4 L, 6-32
3111-0005-0001 Ref.40-0005Insulator, Combo, Boron Nitride
40-0369RSFil. Bus Assy., Bernas, Ag, RIGHT
40-0369SFil. Bus Assy., Bernas, Ag, LEFT
5880-0689-0001 Ref.40-0563-1Plate, Mtg. A/C
0843-0007-2001 Ref.40-0843Arc Chamber End Cap
40-0934XModify Corona Shield
6692-0124-600040-1246Graphite Plate
1976-0001-1001 Ref.40-1979Filament, 2.86 x .043 Dia
40-8000Main Body, Std. inlets
N/A40-8000AMain Body, w/1/8 ID gas inlet
40-8001AFront Plate, f/aperture
40-8002Filament, Bernas .040"
40-8005Aperture, Replacement
40-8007BGas Feed Tube, Ta Tip
17100430 Ref.40-8983-3Repeller, Short, Graphite
7435-0003-000144-0003Thermocouple Gauge Tube, DV4D Type
3111-0004-000144-0004Insulator, Filament
3100-0012-000144-0012Insert, Emissive Electrode
3113-0013-000144-0013Filament Insulator, Al2O3
3113-0015-000144-0015Insulator, Inner
1550-0016-000144-0016Filament Electrode, SKM
1550-0017-000144-0017Electrode, Emissive
6692-0083-000144-0083Ring, External Retaining, 1/2 s/s
1001-0016-000144-0161Connector, Electrode, SKM
0843-0007-200144-0843Arc Chamber End Cap
0896-0005-400144-0896Arc Chamber
0897-0034-0001(2)44-08974Arc Chamber, HT
1979-0001-100144-1979Filament, W 2.86"L x 0.04" Dia.
1979-0004-000144-19794Filament 2% Thoriated W
3110-0015-200144-3110Filament Insulator
7435-0001-000144-3308Thermocouple Gauge Tube DV-6M Type
1952-0015-0001 44-5215Feedthru, Fil., Tantalum
1952-0015-000344-52151Feedthrough Filament, Moly
7631-0001-000244-7631Ion Gauge Tube, 3/4" Kovar TT
0897-0033-000144-8973Arc Chamber, SKM
0342-0369-3001 Ref.47-0369Filament Buss, Ag
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com