Parts List for Aixtron 2000 Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
41070023PIC53-01602000 Series Exhaust Ring, (Mo seg)
4006003053-0300Glovebox Gauntlets - 300MM
4107000553-04602000 Series Exhaust Ring, (Mo seg)
4002076353-11802000G3 HT Tension Disk (Quartz)
4002082653-11902000HT Tension Disk (Quartz)
4002061653-20002000HT Supporting Tube (Quartz)
4002071453-20102000HT Supporting Tube (Quartz)
4002039553-20202000HT Supporting Tube (Quartz)
4002061853-20302000HT Supporting Disk (Quartz)
4002082753-20402000HT Supporting Disk (Quartz)
4002039553-2050Sleeve (Quartz)
4002061753-20602000HT Pull Down Pad (Quartz)
4002018453-20702000HT Nozzle (Quartz)
4002018353-20802000HT Nozzle Holder (Quartz)
4002027353-20902000HT Exhaust Tube (Quartz)
4002058453-30002000HT Ceiling Plate (Quartz)
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com