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Parts List for Axcelis - Eaton 3204, 3200 and 6200 Systems
 
A small picture following the Signet part number is a link to the Part Picture page. 
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. 
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.
The initial list is in OEM part number Sequence, use the up arrows up arrow image before the Signet
Part Number or OEM Part Number to re-sort the list.
up arrow OEM PN Picture DWG u arrow Signet Part # Part Description KIT PDS
5053-0001-010103-1N0010-32 Hex Nut
5053-0001-004203-4N004-40 Hex Nut
N/A1088B6200 Bernas Conversion KitKITPDS
N/A1088C6200 Bernas Conversion KitKITPDS
30-7280CAlumina Bushing, .050" HubPDS
7435-0002-000137-0531TC Vacuum Gauge Tube
7230-0003-000437-6000Standoff, 3/8D X 1/2L, 6-32 5/32Dp.
7230-0003-001437-6002Standoff, 3/8D X 3/4L, 6-32
7230-0003-002037-6045Standoff, 1/2D X 3/4 L, 6-32
3111-0005-0001 Ref.40-0005Insulator, Combo, Boron NitridePDS
40-0369RSFil. Bus Assy., Bernas, Ag, RIGHT
40-0369SFil. Bus Assy., Bernas, Ag, LEFT
5880-0689-0001 Ref.40-0563-1Plate, Mtg. A/C
0843-0007-2001 Ref.40-0843Arc Chamber End Cap
40-0934XModify Corona ShieldPDS
6692-0124-600040-1246Graphite Plate
1976-0001-1001 Ref.40-1979Filament, 2.86 x .043 Dia
40-8000Main Body, Std. inlets
N/A40-8000AMain Body, w/1/8 ID gas inletPDS
40-8001AFront Plate, f/aperturePDS
40-8002Filament, Bernas .040" PDS
40-8005Aperture, Replacement
40-8007BGas Feed Tube, Ta TipPDS
17100430 Ref.40-8983-3Repeller, Short, GraphitePDS
7435-0003-000144-0003Thermocouple Gauge Tube, DV4D Type
3111-0004-000144-0004Insulator, Filament
3100-0012-000144-0012Insert, Emissive Electrode
3113-0013-000144-0013Filament Insulator, Al2O3
3113-0015-000144-0015Insulator, InnerPDS
1550-0016-000144-0016Filament Electrode, SKM
1550-0017-000144-0017Electrode, Emissive
6692-0083-000144-0083Ring, External Retaining, 1/2 s/s
1001-0016-000144-0161Connector, Electrode, SKM
0843-0007-200144-0843Arc Chamber End Cap
0896-0005-400144-0896Arc Chamber
0897-0034-0001(2)44-08974Arc Chamber, HT
1979-0001-100144-1979Filament, W 2.86"L x 0.04" Dia.
1979-0004-000144-19794Filament 2% Thoriated W
3110-0015-200144-3110Filament Insulator
7435-0001-000144-3308Thermocouple Gauge Tube DV-6M Type
1952-0015-0001 44-5215Feedthru, Fil., Tantalum
1952-0015-000344-52151Feedthrough Filament, Moly
7631-0001-000244-7631Ion Gauge Tube, 3/4" Kovar TTPDS
0897-0033-000144-8973Arc Chamber, SKM
0342-0369-3001 Ref.47-0369Filament Buss, Ag
     
 
Copyrights Signet Products, Corp. 2017
  
 
 
Last update January 27, 2016
  
 
     
 
Signet Products, Corporation
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
Phone: (650) 592-3575
e-mail: rdavies@signetproducts.com