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| Product Data Sheets for Implanter Novellus Systems | ||
| Signet PN | OEM Part or Reference | PDS Description | PDS | |
| 40-2350 | NV10 Series | NV10 Graphite electrode, rep | PDS | |
| 40-6035 | NV10, NV20 and GSD Series | Long 6000 U Liner | PDS | |
| 40-8980-1 | NV10, NV20 and GSD Series | Filament Clamp, Enhanced | PDS | |
| 44-8788 | GSD - ELS | Enhanced GSD ELS Fil Support | PDS | |
| Multiple | Graphite Parts for Axcelis Equipment. | NV Series Graphite PNs | PDS | |
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Last update March 21, 2010 |
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