![]() |
||
| Product Data Sheets for VSEA 350 Series Systems | ||
| Signet PN | OEM Part or Reference | PDS Description | PDS | |
| 1001 | A2F - 350D | Filament Kit 1001 | PDS | |
| 1004 | A2F - 350D | Filamanet Kit 1004 | PDS | |
| 30-5395-7 | CF/DF3000 - 350D/DE/XP | Gnd Elect. w Graphite Ion Slot | PDS | |
| 30-5395T | CF/DF3000 - 300XP | Electrode Alignment Tool | PDS | |
| 30-6042 | VSEA and Axcelis Implanters | 3/8 X 3/8 Standoff and Shield | PDS | |
| 32-5393 | A2f - 350D Ref. | Filament Connector Rod, Imp'd | PDS | |
| 37-5395A | CF/DF3000, 350D/DE & 300XP | Ground Electrode w Pivot Pin | PDS | |
|
||||||||||
Last update March 21, 2010 |
||||||||||
|
||||||||||