"Quality and Value through Engineering" |
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| Product Data Sheets for Physical Vapor Deposition Novellus Systems | ||
| Signet PN | OEM Part or Reference | PDS Description | PDS | |
| 3001 | Novelus 3180 and 3190 Equipment | Target Replacement Kit | PDS | |
| 33-2057 | 3180, 3190 and 3290 Equipment | Signet Wafer Clips | PDS | |
| 33-rings | 3180, 3190 and 3290 Equipment | Ceramic Rings | PDS | |
| 8500 | Novellus Concept Series | Sequel Express RF Strap Kit | PDS | |
| 8501A | Novellus Concept Series | Concept Series Sequel Heater Strap Kit | PDS | |
| Multiple | 3180, 3190 and 3290 Equipment | 3180/90 cavity/htr screw shields | PDS | |
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Last update March 21, 2010 |
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